Semiconductor devices having bridge layer and methods of manufacturing the same

ABSTRACT

A semiconductor device includes a substrate, a first active fin and a second active fin on the substrate, respectively, a plurality of first epitaxial layers on the first active fin and on the second active fin, respectively, a plurality of second epitaxial layers on the plurality of first epitaxial layers, a bridge layer connecting the plurality of second epitaxial layers to each other, and a third epitaxial layer on the bridge layer.

CROSS-REFERENCE TO RELATED APPLICATIONS

This U.S. non-provisional patent application claims priority as acontinuation application of U.S. patent application Ser. No. 15/177,421,filed Jun. 9, 2016 which is a continuation of U.S. patent applicationSer. No. 14/576,368, filed Dec. 19, 2014, which in turn claims priorityunder 35 U.S.C. §119 to Korean Patent Application No. 10-2014-0057209filed on May 13, 2014 in the Korean Intellectual Property Office (KIPO),the contents of which are herein incorporated by reference in theirentirety.

BACKGROUND

In order to provide semiconductor devices with a more rapid operationalspeed and increased integration degree, a channel length of a MOS fieldeffect transistor (MOSFET) has been gradually reduced. However, this maycause a short channel effect.

Therefore, a fin-type field effect transistor (FinFET) having a threedimensional channel region may be of increasing interest in thesemiconductor business because it may reduce the short channel effectand may increase drive current of the MOSFET at a low operation voltage.

Some research has been conducted on the use of an epitaxial layer havinga tensile or compressive stress in the semiconductor devices to increasecarrier mobility in a channel region of the MOSFET.

SUMMARY

Some embodiments of the present inventive concepts provide semiconductordevices having a bridge layer and methods of manufacturing the same.

In some embodiments, a semiconductor device may include a substrate, afirst active fin and a second active fin on the substrate, respectively,a first epitaxial layer on the first active fin, a second epitaxiallayer on the second active fin, a bridge layer connecting the firstepitaxial layer to the second epitaxial layer, and a third epitaxiallayer on the bridge layer.

Some embodiments provide that each of the first through the thirdepitaxial layers may have a flat upper surface, respectively. In someembodiments, the upper surfaces of the first through the third epitaxiallayers may be disposed on substantially the same plane. Some embodimentsprovide that the third epitaxial layer may be disposed between the firstepitaxial layer and the second epitaxial layer. The bridge layer mayhave a different germanium (Ge) concentration from those of the firstthrough the third epitaxial layers. The bridge layer may comprise boron(B), and the first through the third epitaxial layers may comprisegermanium (Ge).

In some embodiments, the semiconductor device may further include acapping layer between the first epitaxial layer and the third epitaxiallayer and between the second epitaxial layer and the third epitaxiallayer, respectively. The bridge layer and the capping layer may becomposed of substantially the same material.

In some embodiments, the semiconductor device may include a substrate, aplurality of active fins on the substrate, a bridge layer connecting theplurality of active fins to each other, an epitaxial layer on the bridgelayer, and a contact on the plurality of active fins and on theepitaxial layer.

Some embodiments provide that the epitaxial layer may be disposedbetween each of the plurality of active fins. In some embodiments, thecontact may be connected to the plurality of active fins and to theepitaxial layer, simultaneously. Some embodiments provide that ones ofthe plurality of active fins and the epitaxial layer may have a flatupper surface, respectively. In some embodiments, the plurality ofactive fins and the epitaxial layer may be composed of substantially thesame material.

Some embodiments provide that the semiconductor device may furtherinclude a capping layer between the plurality of active fins and theepitaxial layer. In some embodiments, the bridge layer and the cappinglayer may be composed of substantially the same material.

In some embodiments, the semiconductor device may include a substrate, aplurality of active fins protruding from the substrate and having ap-type impurity, a bridge layer connecting the plurality of active finsto each other, an epitaxial layer on the bridge layer, and a contact onthe plurality of active fins and on the epitaxial layer. The bridgelayer may be disposed between the plurality of active fins.

In some embodiments, ones of the plurality of active fins and theepitaxial layer may have a flat upper surface, respectively. Someembodiments provide that the plurality of active fins and the epitaxiallayer may be composed of substantially the same material. In someembodiments, the semiconductor device may further include a cappinglayer between the plurality of active fins and the epitaxial layer. Someembodiments provide that the bridge layer and the capping layer may becomposed of substantially the same material.

It is noted that aspects of the inventive concept described with respectto one embodiment, may be incorporated in a different embodimentalthough not specifically described relative thereto. That is, allembodiments and/or features of any embodiment can be combined in any wayand/or combination. These and other objects and/or aspects of thepresent inventive concept are explained in detail in the specificationset forth below.

BRIEF DESCRIPTION OF THE DRAWINGS

The foregoing and other features and advantages of this disclosure willbe apparent from the more particular description of the exampleembodiments, as illustrated in the accompanying drawings in which likereference characters refer to the same parts throughout the differentviews. The drawings are not necessarily to scale, emphasis instead beingplaced upon illustrating the principles of the disclosed embodiments.

FIG. 1 is a perspective view illustrating a semiconductor deviceaccording to some embodiments of the inventive concepts.

FIG. 2 is a cross-sectional view corresponding to line A-A of FIG. 1.

FIG. 3 is a cross-sectional view corresponding to line B-B of FIG. 1.

FIG. 4 is a cross-sectional view illustrating a semiconductor deviceaccording to some embodiments of the inventive concepts.

FIG. 5 is a cross-sectional view illustrating a semiconductor deviceaccording to some embodiments of the inventive concepts.

FIG. 6 is a cross-sectional view illustrating a semiconductor deviceaccording to some embodiments of the inventive concepts.

FIG. 7 is a cross-sectional view illustrating a semiconductor deviceaccording to some embodiments of the inventive concepts.

FIG. 8 is a cross-sectional view illustrating a semiconductor deviceaccording to some embodiments of the inventive concepts.

FIG. 9 is a cross-sectional view illustrating a semiconductor deviceaccording to some embodiments of the inventive concepts.

FIG. 10 is a cross-sectional view illustrating a semiconductor deviceaccording to some embodiments of the inventive concepts.

FIG. 11 is a cross-sectional view illustrating a semiconductor deviceaccording to some embodiments of the inventive concepts.

FIGS. 12 through 14 are a circuit diagram and layouts illustrating asemiconductor device according to some embodiments of the inventiveconcepts.

FIG. 15 is a flow chart illustrating methods of fabricating asemiconductor device according to some embodiments of the inventiveconcepts.

FIG. 16 is a flow chart illustrating methods of fabricating asemiconductor device according to some embodiments of the inventiveconcepts.

FIGS. 17 through 24 are cross-sectional views illustrating methods offabricating a semiconductor device according to some embodiments of theinventive concepts.

FIG. 25 is a block diagram of an electronic system including asemiconductor device according to some embodiments of the inventiveconcepts.

FIG. 26 is a block diagram of an electronic system including asemiconductor device according to some embodiments of the inventiveconcepts.

DETAILED DESCRIPTION

Example embodiments of the inventive concepts will now be described morefully hereinafter with reference to the accompanying drawings; however,they may be embodied in different forms and should not be construed aslimited to the exemplary embodiments set forth herein.

It will be understood that when an element is referred to as being “on,”“connected” or “coupled” to another element, it can be directly on,connected or coupled to the other element or intervening elements may bepresent. In contrast, when an element is referred to as “contacting,” orbeing “directly on,” “directly connected” or “directly coupled” toanother element, there are no intervening elements present. Other wordsused to describe the relationship between elements or layers should beinterpreted in a like fashion (e.g., “between” versus “directlybetween,” “adjacent” versus “directly adjacent,” “under” versus“directly under”).

It will be understood that, although the terms “first”, “second”, etc.,may be used herein to describe various elements, components, regions,layers and/or sections, these elements, components, regions, layersand/or sections should not be limited by these terms. Unless the contextindicates otherwise, these terms are only used to distinguish oneelement, component, region, layer or section from another element,component, region, layer or section. Thus, a first element, component,region, layer or section discussed below could be termed a secondelement, component, region, layer or section without departing from theteachings of example embodiments.

In the figures, the dimensions of layers and regions may be exaggeratedfor clarity of illustration.

Spatially relative terms, e.g., “beneath,” “below,” “lower,” “above,”“upper” and the like, may be used herein for ease of description todescribe the relationship of one element or feature to anotherelement(s) or feature(s), as illustrated in the figures. It will beunderstood that the spatially relative terms are intended to encompassdifferent orientations of the device in use or operation in addition tothe orientation depicted in the figures. For example, if the device inthe figures is turned over, elements described as “below” or “beneath”other elements or features would then be oriented “above” the otherelements or features. Thus, the exemplary term “below” can encompassboth an orientation of above and below. The device may be otherwiseoriented (rotated 90 degrees or at other orientations) and the spatiallyrelative descriptors used herein interpreted accordingly.

As used herein, the term “and/or” includes any and all combinations ofone or more of the associated listed items. The use of the terms “a” and“an” and “the” and similar referents in the context of describingembodiments (especially in the context of the following claims) are tobe construed to cover both the singular and the plural, unless otherwiseindicated herein or clearly contradicted by context. The terms“comprising,” “having,” “including,” and “containing” are to beconstrued as open-ended terms (i.e., meaning “including, but not limitedto”) unless otherwise noted.

Unless defined otherwise, all technical and scientific terms used hereinhave the same meaning as commonly understood by one of ordinary skill inthe art. It is noted that the use of any and all examples, or exemplaryterms provided herein is intended merely to better illuminate theexample embodiments and is not a limitation on the scope of theinventive concepts unless otherwise specified.

Example embodiments will be described with reference to perspectiveviews, cross-sectional views, and/or plan views. The profile of anexample view may be modified according to, e.g., manufacturingtechniques and/or allowances. Accordingly, the example embodiments arenot intended to limit the scope, but cover all changes and modificationsthat can be caused due to, e.g., a change in manufacturing process.Thus, regions shown in the drawings are illustrated in schematic formand the shapes of the region are presented simply by way of illustrationand not as a limitation.

Unless the context indicates otherwise, terms such as “same,” “equal,”“planar,” or “coplanar,” as used herein when referring to orientation,layout, location, shapes, sizes, amounts, or other measures do notnecessarily mean an exactly identical orientation, layout, location,shape, size, amount, or other measure, but are intended to encompassnearly identical orientation, layout, location, shapes, sizes, amounts,or other measures within acceptable variations that may occur, forexample, due to manufacturing processes. The term “substantially” may beused herein to reflect this meaning.

Although corresponding plan views and/or perspective views of somecross-sectional view(s) may not be shown, the cross-sectional view(s) ofdevice structures illustrated herein provide support for a plurality ofdevice structures that extend along two different directions as would beillustrated in a plan view, and/or in three different directions aswould be illustrated in a perspective view. The two different directionsmay or may not be orthogonal to each other. The three differentdirections may include a third direction that may be orthogonal to thetwo different directions. The plurality of device structures may beintegrated in a same electronic device. For example, when a devicestructure (e.g., a memory cell structure or a transistor structure) isillustrated in a cross-sectional view, an electronic device may includea plurality of the device structures (e.g., memory cell structures ortransistor structures), as would be illustrated by a plan view of theelectronic device. The plurality of device structures may be arranged inan array and/or in a two-dimensional pattern.

Hereinafter, example embodiments of the inventive concepts will bedescribed in detail with reference to the accompanying drawings.

FIG. 1 is a perspective view illustrating a semiconductor deviceaccording to some embodiments of the inventive concepts. FIG. 2 is across-sectional view corresponding to line A-A of FIG. 1. FIG. 3 is across-sectional view corresponding to line B-B of FIG. 1.

Referring to FIGS. 1 through 3, a semiconductor device 1 according tosome embodiments of the inventive concepts may include a substrate 100,a device isolation region 110, a first active fins F1, a second activefin F2, a gate structure TR, a first epitaxial layer 210, a secondepitaxial layer 220, a bridge layer 300, and a third epitaxial layer230.

The substrate 100 may comprise a bulk silicon substrate or asilicon-on-insulator (SOI) substrate. For example, the substrate 100 maybe a rigid substrate including silicon (Si), silicon germanium (SiGe),or glass which may be used in display panel. In some embodiments, thesubstrate 100 may be a flexible substrate including polyimide,polyester, polycarbonate, polyethersulfone, polymethylmethacrylate,polyethylenenaphthalate, and/or polyethyleneterephthalate.

The substrate 100 may have a first region I and a second region II. Thefirst region I and the second region II may be separated by a deviceisolation region 110, e.g., shallow trench isolation (STI). The firstregion I may be a PMOS region and the second region II may be an NMOSregion, however, it shall not be restricted or limited thereto.

Hereinafter, it will be described that the substrate 100 is a PMOSregion for convenience of description.

The device isolation region 110 may include a high-density-plasma (HDP)oxide layer, a silicon-on-glass (SOG) oxide layer, and/or achemical-vapor-deposition (CVD) oxide layer.

The first active fin F1 and the second active fin F2 may be formed onthe substrate 100. The first active fin F1 and the second active fin F2may have a shape of protruding from the substrate 100. The first andsecond active fins F1 and F2 may be a part of the substrate 100 orformed by using at least one step of epitaxial processes.

The first and second active fins F1 and F2 may extend to a seconddirection (Y-axis direction). The device isolation region 110 may beformed on the substrate 100 and may cover a lower portion of sidewallsof the first and second active fins F1 and F2.

A gate structure TR may be formed on the first and second active fins F1and F2. The gate structure TR may cross the first and second active finsF1 and F2 and may extend to a first direction (X-axis direction).

The gate structure TR may include an interface layer 120, a gatedielectric layer 130, a work-function control layer 140, a gate metal150, and a gate spacer 160, which are sequentially formed on thesubstrate 100. Therefore, a channel region may be formed not only onupper surfaces but also sidewalls of the first active fin F1 and thesecond active fin F2, respectively.

The interface layer 120 may be formed on the device isolation region 110and on the first and second active fins F1 and F2. The interface layer120 may reduce some problems, for example, adhesion properties inducedby different coefficient of thermal expansion, between the deviceisolation region 110 and the gate dielectric layer 130.

The interface layer 120 may be formed of an insulating layer, forexample, at least one of silicon oxide layer, silicon oxynitride layer,a silicate layer, or mixture thereof, having a low dielectric constant.The dielectric constant of the interface layer 120 may be less than 9.

The gate dielectric layer 130 may be formed on the interface layer 120.If the interface layer 120 is omitted, the gate dielectric layer 130 maybe formed on the first and second active fins F1 and F2 and on thedevice isolation region 110.

The gate dielectric layer 130 may include a high-k material, forexample, at least one of hafnium silicon oxynitride (HfSiON), hafniumoxide (HfO₂), zirconium oxide (ZrO₂), tantalum oxide (Ta₂O₅), titaniumoxide (TiO₂), strontium titanate (SrTiO₃), and/or barium titanate(BaTiO₃).

Thickness of the gate dielectric layer 130 may be changed according tothe kind thereof. For example, if the gate dielectric layer 130 is ahafnium oxide (HfO₂), the thickness thereof may be from 0.5 nm to 5 nm.The gate dielectric layer may be formed along the sidewall of the gatespacer 160.

The work-function control layer 140 may be formed on the gate dielectriclayer 130. The work-function control layer 140 may include at least oneof molybdenum (Mo), palladium (Pd), ruthenium (Ru), platinum (Pt),titanium nitride (TiN), tungsten nitride (WN), tantalum nitride (TaN),iridium (Ir), tantalum carbide (TaC), ruthenium nitride (RuN), titaniumaluminum (TiAl), tantalum aluminum carbide (TaAlC), titanium aluminumnitride (TiAlN), molybdenum nitride (MoN), and/or mixture thereof. Forexample, the work-function control layer 140 may be composed of twolayers, which are sequentially formed of titanium nitride (TiN) andtantalum nitride (TaN).

According to some embodiments of the inventive concepts, thework-function control layer 140 may be formed along the sidewall of thegate spacer 160.

The gate metal 150 may be formed on the work-function control layer 140.The gate metal 150 may include at least one of tungsten (W), aluminum(Al), and/or mixture thereof.

The gate spacer 160 may be formed on at least one sidewall of the gatestructure TR. The gate spacer 160 may include at least one of siliconnitride (SiN), silicon oxynitride (SiON), and/or mixture thereof. Thegate spacer 160 may have a shape of a round type, an I-type, or aL-type.

A source/drain region may be formed in the first and second active finsF1 and F2 which are adjacent sidewalls of the gate structure TR. Thesource/drain region may be separated from the gate structure TR by thegate spacer 160.

The first epitaxial layer 210 may be formed on the first active fin F1.The first epitaxial layer 210 may fill a first recess region R1 which isformed in a portion of the first active fin F1. The first epitaxiallayer 210 may be formed by a selective-epitaxial-growth (SEG) process.

In a PMOS region of a fin-type field effect transistor (FinFET), thefirst epitaxial layer 210 may include a material which may induce acompressive stress in a channel region of the FinFET. Therefore, thefirst epitaxial layer 210 may be formed a material having a latticeconstant greater than that of the substrate 100. For example, if thesubstrate 100 is a silicon (Si) substrate, the first epitaxial layer 210may comprise silicon germanium (SiGe).

The second epitaxial layer 220 may be formed on the second active finF1. The second epitaxial layer 220 may fill a second recess region R2which is formed in a portion of the second active fin F2. The secondepitaxial layer 220 may be formed by a selective-epitaxial-growth (SEG)process. The second epitaxial layer 220 may also include a materialwhich may induce a compressive stress in a channel region of the FinFET.

The first and second epitaxial layers 210 and 220 may be formedsimultaneously, or may be formed by separate processes, respectively.

If the first and second epitaxial layers 210 and 220 are formed by usinga SEG process, upper surfaces of the first and second epitaxial layers210 and 220 may have <100> plane orientation by the structuralcharacteristics of the first and second active fins F1 and F2.Therefore, the first and second epitaxial layers 210 and 220 may have adiamond shape, respectively.

If a capping layer having a thin thickness is formed on the first andsecond epitaxial layers 210 and 220, it should be difficult to connectthe first and second epitaxial layers 210 and 220 each other. Therefore,a source/drain contact which will be formed at the following step maynot have enough bottom area and contact resistance of the source/draincontact may be increased.

If the capping layer having a relatively thick thickness is formed onthe first and second epitaxial layers 210 and 220, upper surfaces of thefirst and second epitaxial layers 210 and 220 may have uneven surfaceseven though they may be merged. Therefore, a silicide layer which willbe formed at the following step may be unstably formed on the first andsecond epitaxial layers 210 and 220.

In addition, if the first and second epitaxial layers 210 and 220 aregrown to an extent that they may merge, the upper surfaces of the firstand second epitaxial layers 210 and 220 may also have uneven surfacesbecause the first and the second active fins F1 and F2 may have variouspitch sizes between them.

Therefore, some embodiments of the inventive concepts provide methods offorming a bridge layer 300. The bridge layer 300 may be formed betweenthe first and second active fins F1 and F2. A third epitaxial layer 230may be formed on the bridge layer 300.

The upper surfaces of the first and second epitaxial layers 210 and 220may have an even surface by forming the bridge layer 300 and the thirdepitaxial layer 230. Therefore, a silicide layer may be uniformly formedon the first and second epitaxial layers 210 and 220 and on the thirdepitaxial layer 230. Furthermore, the bottom surface of the source/draincontact may have enough area and the contact resistance of thesource/drain contact may be reduced.

A capping layer 400 may be formed on the first and second epitaxiallayers 210 and 220 before forming the bridge layer 300.

The third epitaxial layer 230 may be formed to fill the space betweenthe first and second epitaxial layers 210 and 220 by using a SEGprocess.

The third epitaxial layer 230 may be formed from the surfaces of thebridge layer 300 and the first and second epitaxial layers 210 and 220.The upper surface of the third epitaxial layer 230 may have a flatsurface by filling the space between the first and second epitaxiallayers 210 and 220 and by performing a planarization process, forexample, a chemical mechanical polishing (CMP) process. Therefore, thefirst and second epitaxial layers 210 and 220 may be merged uniformlyand the upper surfaces of the first through the third epitaxial layers210, 220, and 230 may have substantially the same plane.

The bridge layer 300 may have a different germanium (Ge) concentrationfrom those of the first through the third epitaxial layers 210, 220, and230. The bridge layer 300 may comprise a p-type impurity, e.g., boron(B). The first through the third epitaxial layers 201, 220, and 230 maycomprise germanium (Ge).

Hereinafter, a description for a semiconductor device according to someembodiments of the inventive concepts will be described.

FIG. 4 is a cross-sectional view illustrating a semiconductor deviceaccording to some embodiments of the inventive concepts. For convenienceof explanation, some of descriptions which are substantially the samedescription corresponding to embodiments of the inventive conceptsdescribed above will be omitted.

Referring to FIG. 4, the semiconductor device 2 according to someembodiments may include a capping layer 400 formed at between the firstepitaxial layer 210 and the third epitaxial layer 230 and between thesecond epitaxial layer 220 and the third epitaxial layer 230,respectively.

The capping layer 400 may cover outer surfaces of the first and secondepitaxial layers 210 and 220. The capping layer 400 may be formed on thefirst and second epitaxial layers 210 and 220 by using an epitaxialprocess. The capping layer 400 may be formed using different methodsincluding, for example, atomic layer deposition (ALD), chemical vapordeposition (CVD), plasma enhanced chemical vapor deposition (PECVD),and/or low pressure chemical vapor deposition (LPCVD).

Some embodiments provide that the bridge layer 300 and the capping layer400 may be composed of substantially the same material. The bridge layer300 and the capping layer 400 may be formed simultaneously and mayinclude boron (B). The boron concentration of the capping layer 400 maybe equal to or less than that of the bridge layer 300. The boronconcentration of the bridge layer 300 may be greater than 2.0E19atoms/cc.

FIG. 5 is a cross-sectional view illustrating a semiconductor deviceaccording to some embodiments of the inventive concepts. For convenienceof explanation, some of descriptions which are substantially the samedescription corresponding to the embodiments of the inventive conceptsdescribed above will be omitted.

Referring to FIG. 5, the semiconductor device 3 according to someembodiments may include a first through a third epitaxial layer 210,220, and 230 which has uneven upper surface, respectively. If the uppersurfaces of the first through the third epitaxial layer 210, 220, and230 are uneven, contact surface between the contact and the firstthrough the third epitaxial layer 210, 220, and 230 may be increased andthe contact resistance thereof may be deceased.

Upper portions of the first through the third epitaxial layers 210, 220,and 230 may be partially removed by using a dry etching process or a wetetching process. At this moment, the upper surfaces of the first throughthe third epitaxial layers 210, 220, and 230 may have uneven surfaces asshown in FIG. 5.

FIG. 6 is a cross-sectional view illustrating a semiconductor deviceaccording to some embodiments of the inventive concepts.

Referring to FIG. 6, the semiconductor device 4 according to someembodiments may include a bridge layer 300 having an uneven uppersurface. According to the shape of the upper surface of the bridge layer300, the third epitaxial layer 230 may be formed without any void. Ifany void is formed in the third epitaxial layer 230, reliability of thesemiconductor device may be degraded.

FIG. 7 is a cross-sectional view illustrating a semiconductor deviceaccording to some embodiments of the inventive concepts. For convenienceof explanation, some of descriptions which are substantially the samedescription corresponding to some embodiments of the inventive conceptsdescribed above will be omitted.

Referring to FIG. 7, the semiconductor device 5 according to someembodiments may include a bridge layer 300 having an uneven uppersurface. Additionally, the upper surfaces of the first through the thirdepitaxial layers 210, 220, and 230 may have uneven upper surfaces,respectively.

FIG. 8 is a cross-sectional view illustrating a semiconductor deviceaccording to some embodiments of the inventive concepts.

Referring to FIG. 8, the semiconductor device 6 according to someembodiments may include four epitaxial layers 211, 212, 213, and 214formed on four active fins F1, F2, F3, and F4, respectively. However,the number of epitaxial layers and fins shall not be restricted orlimited thereto. The four epitaxial layers 211, 212, 213, and 214 may bemerged by a bridge layer 300. Additional epitaxial layers 231, 232, and233 may be formed on the bridge layer 300.

Upper surfaces of the epitaxial layers 211, 212, 213, 214, 231, 232, and233 may have even surfaces.

FIG. 9 is a cross-sectional view illustrating a semiconductor deviceaccording to some embodiments of the inventive concepts. For convenienceof explanation, some of descriptions which are substantially the samedescription corresponding to some embodiments of the inventive conceptsdescribed above will be omitted.

Referring to FIG. 9, the semiconductor device 7 according to someembodiments may include epitaxial layers 211, 212, 213, 214, 231, 232,and 233 having uneven upper surfaces.

FIG. 10 is a cross-sectional view illustrating a semiconductor deviceaccording to some embodiments of the inventive concepts. For convenienceof explanation, some of descriptions which are substantially the samedescription corresponding to some embodiment of the inventive conceptsdescribed above will be omitted.

Referring to FIG. 10, the semiconductor device 8 according to someembodiments may include a contact 500 formed on epitaxial layers 211,212, 213, 214, 231, 232, and 233 having even upper surfaces. The contact500 may comprise a silicide layer 501, a barrier layer 502, and a metallayer 503.

FIG. 11 is a cross-sectional view illustrating a semiconductor deviceaccording to some embodiments of the inventive concepts. For convenienceof explanation, some of descriptions which are substantially the samedescription corresponding to some embodiments of the inventive conceptsdescribed above will be omitted.

Referring to FIG. 11, the semiconductor device 9 according to someembodiments may include a contact 500 formed on epitaxial layers 211,212, 213, 214, 231, 232, and 233 having uneven upper surfaces. If theupper surfaces of epitaxial layers 211, 212, 213, 214, 231, 232, and 233are uneven, contact surface between the contact 500 and the epitaxiallayers 211, 212, 213, 214, 231, 232, and 233 may be increased and thecontact resistance thereof may be deceased.

FIG. 12 is a circuit diagram illustrating a semiconductor deviceaccording to some embodiments of the inventive concepts. FIG. 13 is anequivalent layout of the circuit diagram shown in FIG. 12, and FIG. 14is a plan view illustrating just a plurality of fins and gate structuresshown in FIG. 13. The semiconductor devices according to the severalexample embodiments of the inventive concepts may be applied to logicdevices and/or Static Random Access Memory (SRAM) devices havingfin-type field effect transistors. FIGS. 12 through 14 are a circuitdiagram and layouts illustrating a SRAM device.

Referring to FIG. 12, the semiconductor device according to someembodiments of the inventive concepts may include a SRAM device having afirst inverter INV1 and a second inverter INV2 which are formed betweena power supply node VCC and a ground node VSS. The first inverter INV1,having an input node and an output node, may have a first pull-uptransistor PU1 and a first pull-down transistor PD1. The second inverterINV2, having an input node and an output node, may have a second pull-uptransistor PU2 and a second pull-down transistor PD2. The input node ofthe first inverter INV1 may be connected to a source/drain region of asecond pass transistor PS2 as well as to the output node of the secondinverter INV2. The input node of the second inverter INV2 may beconnected to a source/drain region of a first pass transistor PS1 aswell as to the output node of the first inverter INV1. Gate electrodesof the first and second pass transistors may be connected to a word lineWL. A bit line BL may be connected to a source/drain region of the firstpass transistor PS1. A bit line bar/BL may be connected to asource/drain region of the second pass transistor PS2. The first andsecond pull-up transistors PU1 and PU2 may be PMOS transistors. Thefirst and second pull-down transistors PD1 and PD2 and the first andsecond pass transistors PS1 and PS2 may be NMOS transistors. Thesemiconductor device may include at least one fin-type field effecttransistor according to some embodiments of the present inventiveconcepts.

Referring to FIGS. 13 and 14, a first through fourth active fins F1, F2,F3, and F4 may be extended in a first direction and spaced aprt from oneanother in a second direction that is different from the firstdirection. The lengths of the second and third active fins F2 and F3 maybe less than those of the first and fourth active fins F1 and F4.

A first gate structure 351 may cross over the first and second activefins F1 and F2 to form the first and second pull-down transistor PD1 andthe first pull-up transistor PU1, respectively. A second gate structure352 may cross over the first active fin F1 to form the first passtransistor PS1. The first gate structure 351 and the second gatestructure 352 may be parallel to and apart from each other. A third gatestructure 353 may cross over the third and fourth active fins F3 and F4to form the second pull-down transistor PD2 and the second pull-uptransistor PU2, respectively. A fourth gate structure 354 may cross overthe fourth active region F4 to form the second pass transistor PS2. Thethird gate structure 353 and the fourth gate structure 354 may beparallel to and apart from each other.

A contact hole 361 may be formed on the gate structure of the first andsecond pass transistors PS1 and PS2. Additionally, other contact holesmay be formed on the source/drain regions of the transistors mentionedabove.

A first shared contact 362 may be formed on a portion of the secondactive fin F2. The first shared contact 362 may connect the source/drainof the first pull-up transistor PU1 to the gate structures of the secondpull-up transistor PU2 and the second pull-down transistor PD2. A firstinterconnection line 371 may connect the first shared contact 362 to thesource/drain regions of the first pull-up transistor PD1 and the firstpass transistor PS1.

A second shared contact 363 may be formed on a portion of the thirdactive fin F3. The second shared contact 363 may connect thesource/drain of the second pull-up transistor PU2 to the gate structuresof the first pull-up transistor PU1 and the first pull-down transistorPD1. A second interconnection line 372 may connect the second sharedcontact 363 to the source/drain regions of the second pull-up transistorPD2 and the second pass transistor PS2.

FIG. 15 is a flow chart illustrating methods of fabricating asemiconductor device according to some embodiments of the inventiveconcepts. FIG. 16 is a flow chart illustrating methods of fabricating asemiconductor device according to some embodiments of the inventiveconcepts. FIGS. 17 through 24 are cross-sectional views illustratingmethods of fabricating a semiconductor device according to someembodiments of the inventive concepts.

Referring to FIGS. 15 and 17, a substrate 100 having a plurality ofactive fins F1 and F2 may be provided (block 1100).

The plurality of active fins F1 and F2 may be formed to protrude fromthe substrate 100. A device isolation region 110 may be formed on thesubstrate 100 and may cover a lower portion of sidewalls of theplurality of active fins F1 and F2.

Referring to FIGS. 15 and 18, the plurality of active fins F1 and F2 maybe recessed (block 1110). Upper surfaces of the plurality of active finsF1 and F2 may have substantially the same level with the upper surfaceof the device isolation region 110, however, it shall not be restrictedor limited thereto.

Referring to FIGS. 15 and 19, a first epitaxial layer 210 and a secondepitaxial layer 220 may be formed on the recessed plurality of activefins F1 and F2, respectively (block 1120). The first and secondepitaxial layers 210 and 220 may be formed by using a plurality ofepitaxial processes. For example, the first and second epitaxial layers210 and 220 may be formed by a first epitaxial process and a secondepitaxial process. The first epitaxial process may be performed at ahigh pressure, e.g., about form 50 torr to 400 torr, with germanium(Ge). The second epitaxial process may be performed at a low pressure,e.g., about form 3 torr to 50 torr, with a p-type impurity, e.g., boron(B). The first and second epitaxial processes may be performed in-situ.

Referring to FIG. 20, a capping layer 400 may be formed on the first andsecond epitaxial layers 210 and 220.

The capping layer 400 may be formed by using an atomic layer deposition(ALD) process, a chemical vapor deposition (CVD) process, a plasmaenhanced chemical vapor deposition (PECVD) process, and/or a lowpressure chemical vapor deposition (LPCVD) process.

Referring to FIGS. 15 and 21, a bridge layer 300 may be formed toconnect the first epitaxial layer 210 to the second epitaxial layer 220(block 1130).

The bride layer 300 may be a silicon (Si) layer having a p-typeimpurity, e.g., boron (B). The concentration of boron (B) may be higherthan 2.0E19 atoms/cc. If the bride layer 300 is formed at a lowerpressure, e.g., about from 3 torr to 50 torr, growth rate of the bridgelayer 300 may be greater than at a relatively higher pressure.

The bridge layer 300 and the capping layer 400 may be composed ofsubstantially the same material. For example, the bridge layer 300 andthe capping layer 400 may be a silicon (Si) layer having a p-typeimpurity, e.g., boron (B). The bridge layer 300 may have a firstconcentration of boron (B) and the capping layer 400 may have a secondconcentration of boron (B). The second concentration of boron (B) may beequal to or less than the first concentration boron (B).

Referring to FIGS. 15 and 22, a third epitaxial layer 230 may be formedon the bridge layer 300 (block 1140).

The third epitaxial layer 230 may be grown using a SEG process from thesurfaces of the bridge layer 300 and the capping layer 400 formed on thefirst and second epitaxial layers 210 and 220. The third epitaxial layer230 may be formed to fill the space between the first and secondepitaxial layers 210 and 220.

Referring to FIGS. 15 and 23, upper surfaces of the first through thirdepitaxial layers 210, 220, and 230 may be planarized (block 1150).

Specifically, the first through third epitaxial layers 210, 220, and 230may have a flat surface by performing a planarization process, forexample, a chemical mechanical polishing (CMP) process.

Referring to FIGS. 15 and 24, a contact 500 may be formed on theplanarized surfaces of the first through third epitaxial layers 210,220, and 230 (block 1160). The contact 500 may simultaneously contactthe planarized upper surfaces of the first through third epitaxiallayers 210, 220, and 230.

FIG. 25 is a block diagram of an electronic system including asemiconductor device according to some embodiments of the inventiveconcepts.

Referring to FIG. 25, an electronic system may include a controller 510,an interface 520, an input/output device 530, a memory device 540, apower supply 550, and a bus 560. The controller 510, the interface 520,the input/output device 530, the memory device 540, the power supply 550may communicate with each other through the bus 560. The bus 560 maycorrespond to a path that data can be moved to each other.

The controller 510 may comprise a microprocessor, a digital signalprocessor, a microcontroller, or a similar device that can control anexecutive program. The interface 520 may transfer data to or from acommunication network. The interface 520 may have various forms of wiredor wireless, for example, an antenna or a wired or wireless transceiver.The input/output device 530 may comprise a keypad, a keyboard, or adisplay. The memory device 540 may not only save codes or data forexecuting the controller 510 but also save data executed by thecontroller 510. The memory device 540 may comprise a semiconductordevice according to some embodiments of the inventive concepts. Thepower supply 550 may supply a voltage to all of the elements 510 through540.

FIG. 26 is a block diagram of an electronic system including asemiconductor device according to some embodiments of the inventiveconcepts.

Referring to FIG. 26, the electronic system may comprise a centralprocessing unit (CPU) 610, an interface 620, a peripheral device 630, amain memory 640, a secondary memory 650, and a bus 660.

The CPU 610, the interface 620, the peripheral device 630, the mainmemory 640, a secondary memory 650 may be electrically connected to eachother through the bus 660. The bus 660 may correspond to a path thatdata can be moved to each other. The CPU 610 may comprise a controllerand a computing device, and may execute programs to process data. Theinterface 620 may transfer the data to or from a communication network.The interface 620 may have various forms of wired or wireless, forexample, an antenna or a wired or wireless transceiver. The peripheraldevice 630 may include a mouse, a keyboard and a display, and may inputor output the data. The main memory device 640 may save a command or adata for executing programs but also communicate with the CPU 610. Themain memory device 640 may comprise a semiconductor device according tosome embodiments of the inventive concepts. The secondary memory device650 may be nonvolatile memory device, for example, a magnetic tape, amagnetic disk, a hard disk, a solid state disk (SSD), and/or an opticaldisk. The secondary memory device 650 may save a command or a data forexecuting programs even when the power supply is interrupted.

The electronic system may be applied to a product that can transportinformation or data, e.g., a ultra mobile personal computer, a workstation, a net-book, a PDA (personal digital assistant), a portablecomputer, a web tablet, a wireless phone, a mobile phone, a smart phone,an e-book, a portable multimedia player, a portable game device, anavigation system, a black box, a digital camera, a three dimensionaltelevision, a digital audio recorder, a digital audio player, a digitalpicture player, a digital video recorder, a digital video player, and/ora memory card.

The above-disclosed subject matter is to be considered illustrative andnot restrictive, and the appended claims are intended to cover all suchmodifications, enhancements, and other embodiments, which fall withinthe true spirit and scope of the inventive concepts. Thus, the scope ofthe inventive concepts is to be determined by the broadest permissibleinterpretation of the following claims and their equivalents, and shallnot be restricted or limited by the foregoing detailed description.

What is claimed is:
 1. A semiconductor device comprising: a substrate; afirst active fin on the substrate; a second active fin on the substrate,the second active fin being spaced apart from and substantially parallelto the first active fin; a third active fin on the substrate, the thirdactive fin being spaced apart from and substantially parallel to thesecond active fin; an isolation layer on the substrate and on sidewallsof the first, second, and third active fins; a first epitaxial layer onthe first active fin; a second epitaxial layer on the second active fin;a third epitaxial layer on the third active fin; a first bridge layerbetween the first epitaxial layer and the second epitaxial layer; and asecond bridge layer between the second epitaxial layer and the thirdepitaxial layer, wherein the first bridge layer and the second bridgelayer are spaced apart from an upper surface of the isolation layer. 2.The semiconductor device of claim 1, further comprising: a first cappinglayer on the first epitaxial layer; a second capping layer on the secondepitaxial layer; and a third capping layer on the third epitaxial layer.3. The semiconductor device of claim 1, wherein the first epitaxiallayer is diamond-shaped.
 4. The semiconductor device of claim 1, whereinthe first epitaxial layer comprises a sidewall including a tip, andwherein the sidewall of the first epitaxial layer is convexly curved atthe tip.
 5. The semiconductor device of claim 1, wherein each of thefirst epitaxial layer, the second epitaxial layer, and the thirdepitaxial layer includes germanium (Ge).
 6. The semiconductor device ofclaim 5, wherein each of the first bridge layer and the second bridgelayer includes germanium (Ge).
 7. The semiconductor device of claim 6,wherein a concentration of germanium (Ge) included in the first bridgelayer is different from a concentration of germanium (Ge) included inthe first epitaxial layer, and different from a concentration ofgermanium (Ge) included in the second epitaxial layer, and wherein aconcentration of germanium (Ge) included in the second bridge layer isdifferent from the concentration of germanium (Ge) included in thesecond epitaxial layer, and different from a concentration of germanium(Ge) included in the third epitaxial layer.
 8. The semiconductor deviceof claim 1, wherein the first bridge layer includes a lower surface andan upper surface facing each other, and wherein the lower surface of thefirst bridge layer facing the upper surface of the isolation layer isnon-planar.
 9. The semiconductor device of claim 1, further comprising acontact on the first epitaxial layer and on the second epitaxial layer.10. The semiconductor device of claim 9, wherein a bottom surface of thecontact is uneven.
 11. The semiconductor device of claim 10, wherein thefirst bridge layer includes a lower surface and an upper surface facingeach other, and wherein the upper surface of the first bridge layerfacing the bottom surface of the contact is non-planar.
 12. Thesemiconductor device of claim 9, wherein the contact includes: a barrierlayer; and a metal layer on the barrier layer.
 13. The semiconductordevice of claim 1, further comprising a space between the first bridgelayer and the isolation layer, and between the second bridge layer andthe isolation layer.
 14. The semiconductor device of claim 1, whereinthe first bridge layer has a plurality of layers.
 15. A semiconductordevice comprising: a substrate; a first active fin on the substrate; asecond active fin on the substrate, the second active fin being spacedapart from and substantially parallel to the first active fin; a thirdactive fin on the substrate, the third active fin being spaced apartfrom and substantially parallel to the second active fin; an isolationlayer on the substrate and on sidewalls of the first, second, and thirdactive fins; a first epitaxial layer on the first active fin; a secondepitaxial layer on the second active fin; a third epitaxial layer on thethird active fin; a first bridge layer between the first epitaxial layerand the second epitaxial layer; and a second bridge layer between thesecond epitaxial layer and the third epitaxial layer, wherein the firstbridge layer and the second bridge layer are spaced apart from an uppersurface of the isolation layer, and wherein at least one of a firstsurface of the first bridge layer and a second surface of the secondbridge layer is curved.
 16. The semiconductor device of the claim 15,wherein the at least one of the first surface of the first bridge layerand the second surface of the second bridge layer is convexly curved.17. The semiconductor device of the claim 15, wherein the at least oneof the first surface of the first bridge layer and the second surface ofthe second bridge layer is concavely curved.
 18. A semiconductor devicecomprising: a substrate; a first active fin on the substrate; a secondactive fin on the substrate, the second active fin being spaced apartfrom and substantially parallel to the first active fin; a third activefin on the substrate, the third active fin being spaced apart from andsubstantially parallel to the second active fin; an isolation layer onthe substrate and on sidewalls of the first, second, and third activefins; a semiconductor pattern on the first, second, and third activefins and including a first surface that is uneven; and a contact on thefirst surface of the semiconductor pattern, wherein the semiconductorpattern includes a first epitaxial layer on the first active fin, asecond epitaxial layer on the second active fin, a third epitaxial layeron the third active fin, a first bridge layer between the firstepitaxial layer and the second epitaxial layer, and a second bridgelayer between the second epitaxial layer and the third epitaxial layer,and wherein the first bridge layer and the second bridge layer arespaced apart from an upper surface of the isolation layer.
 19. Thesemiconductor device of claim 18, wherein a bottom surface of thecontact facing the first surface of the semiconductor pattern is uneven.20. The semiconductor device of claim 18, wherein the first surface ofthe semiconductor pattern on the first epitaxial layer, the secondepitaxial layer, and the third epitaxial layer is convexly curved, andwherein the first surface of the semiconductor pattern on the uppersurface of the isolation layer is concavely curved.